Non-Linear Optical Techniques for Visible and UV Lasers and Thin Film Deposition.
Abstract
Experiments are described in which lasers are used to generate specific Column IIIA metal ions. The first studies involved ion pair production in the metal-halide molecules (such as thallium iodide) by illuminating the vapor with 193 nm radiation. More recent experiments have succeeded in producing Al(+) ions by the multiphoton ionization (MPI) of metal alkyls (such as trimethylaluminum) in the visible. Another aspect of the current work is focusing on the use of ultraviolet radiation to enhance the growth rate of semiconductor films grown near pyrolytic threshold. The use of gaseous sensitizers (such as ammonia) to improve film growth rates and quality is also being explored. Finally, a simple photochemical means for improving the efficiency of a commercial XeCl laser by more than 50% has also been discovered. Originator furnished keywords include: Laser; Ultraviolet; Visible; Semiconductor films; Metal films; Excimer laser; Multiphoton ionization.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1984
- Accession Number
- ADA150489
Entities
People
- James Gary Eden
Organizations
- University of Illinois Urbana–Champaign