Spatial Resolution of Small Particles in Silane Discharge.
Abstract
A capacitively coupled, rf glow discharge of silane in argon was a studied with laser light scattering to determine the spatial concentration of small particles. Multi-wavelength scattering profiles have been obtained and are being analyzed to obtain size distributions as a function of spatial location. Very sharply defined particle zones can be found under some plasma conditions that are spatially related to the silicon atom profiles. We will report our results and attempt to qualitatively describe how these zones relate to plasma chemistry and film deposition processes. Originator supplied keywords include: Rf discharge, Silane, Plasma chemistry, Particles, Clusters, and Laser light scattering.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 18, 1985
- Accession Number
- ADA150953
Entities
People
- K. G. Spears
- R. M. Roth
Organizations
- Northwestern University