Electron Stimulated Desorption and the Role of Secondary Electrons.
Abstract
Electron stimulated desorption (ESD) yields of ions and neutrals from surfaces are expected to contain large contributions due to backscattered electrons from the bulk. A procedure for deconvoluting these effects from experimental yield data has been developed which includes contributions from both true secondaries and backscattered primaries. The procedure allows for changes in the backscattered yield with primary energy which is particularly necessary at low primary energies (10-40 eV) where most ESD thresholds occur. This method is applied to recently published excited OH neutral (OH) yield from TiO2. Although this deconvolution procedure reveals significant contributions from backscattered electrons, more importantly it also indicates that a significant yield arises from a direct non resonant excitation mechanism and not from secondary electrons. The resonant portion of the OH yield curve from TiO2 is found to be similar to published O(-) ESD data from O/W and O/Mo. Originator supplied keywords include: Electron stimulated desorption, Secondary electrons, Electron loss spectroscopy.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1984
- Accession Number
- ADA150974
Entities
People
- David E. Ramaker
- F. L. Hutson
- M. A. Hoffbauer
- Victor M. Bermudez
Organizations
- George Washington University