In Situ Thin Film Measurement.

Abstract

A scanning monochromator system for the monitoring of thin film deposition in a box coater is described. The system employs data from both a quartz crystal oscillator and a wide band transmission spectrometer. The spectrometer uses a holographic grating as its dispersive element and a CCD array to collect the data. All data is sent to a microcomputer where the information is displayed, stored, and analyzed. Several applications, including measurement of optical constants of optical constants of inhomogeneous films and characterization of moisture adsorption, are discussed.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1984
Accession Number
ADA151365

Entities

People

  • H. A. Macleod

Organizations

  • University of Arizona

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Accuracy
  • Air Force
  • Arc Lamps
  • Coefficients
  • Crystal Oscillators
  • Data Processing
  • Extinction
  • Films
  • Materials
  • Measurement
  • Military Research
  • Optical Properties
  • Packing Density
  • Refractive Index
  • Scanning
  • Simulations
  • Thin Films

Fields of Study

  • Physics

Readers

  • Image Processing and Computer Vision.
  • Thin Film Deposition Science.