Fabrication of a Biologically-Implantable, Multiplexed, Multielectrode Array of JFETS for Cortical Implantation.

Abstract

A new JFET multielectrode array, comprised of a 16 by 16 array of 256 junction field effect transistors, has been fabricated for use a cortical implant. Changes in the fabrication procedure include: The use of a new chrome, six layer mask set, in lieu of emulsion masks; different diffusion times and temperatures; implementation of HC1 gettering and backside gettering techniques; and a revised processing schedule incorporating different wafer cleaning procedures. The primary emphasis of this thesis was on the development of a viable processing schedule for fabrication of the array. Secondary emphasis was placed upon interfacing the array to an NMOS multiplexer and a proposed method of mounting the device in a cortically implantable package. Originator-Supplied Keywords: JFET; NMOS; Multiplexed, and Multielectrode Array.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1984
Accession Number
ADA151803

Entities

People

  • M. E. Sopko

Organizations

  • Air Force Institute of Technology

Tags

DTIC Thesaurus Topics

  • Air Force
  • Ceramic Materials
  • Chemistry
  • Crystal Defects
  • Crystal Lattices
  • Diffusion Coefficient
  • Electronics Industry
  • Electronics Laboratories
  • Fabrication
  • Field Effect Transistors
  • Materials Processing
  • Measurement
  • Modules (Electronics)
  • P-N Junctions
  • Semiconductor Devices
  • Semiconductors
  • Transistors

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Neuroscience
  • Semiconductor Device Technology