Passivation on High Q Acoustic Strain Sensor for Accelerometer.

Abstract

The objective is to study the passivation effects on the frequency stability of SAW resonators. Cantilever SAW accelerometers based on the SAW resonator to be sensing element of acceleration is considered for a wide spectrum of Air Force applications. To produce the desired accuracy, a quartz beam is designed with the required sensitivity and a size adequate for the resonator structure. A theory of interface waves is developed for the purpose of material and thickness selection of passivation layers. Preliminary results indicated that Y2O3 (yttrium oxide) and AIN (aluminum nitride) were the best materials for passivation of SAW resonators. Keywords include: Accelerometer, Frequency stability, Interface and layered waves, Surface effects, Passivation films, SiO2, Aln, Y2O3.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1984
Accession Number
ADA153565

Entities

People

  • M. W. Motamedi

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors
  • Weapons Technologies

DTIC Thesaurus Topics

  • Accelerometers
  • Acoustic Waves
  • Air Force
  • Aluminum Nitrides
  • Control Systems
  • Fabrication
  • Frequency Shift
  • Guidance
  • Inertial Navigation
  • Inertial Navigation Systems
  • Navigation
  • Rayleigh Waves
  • Resonant Frequency
  • Surface Acoustic Waves
  • Transducers
  • Wave Propagation
  • Yttrium Oxides

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Semiconductor Device Technology
  • Structural Dynamics.