Surface Acoustic Wave Devices as Chemical Vapor Microsensors.

Abstract

This paper describes some of the operational characteristics and performance limitations of microfabricated sensors for chemical vapors which use surface acoustic wave (SAW) phenomena to probe a vapor sensitive coating. Comparisons are made with bulk wave piezoelectric crystal sensors and key technical challenges for future development of SAW vapor sensors are discussed.

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Document Details

Document Type
Technical Report
Publication Date
Apr 18, 1985
Accession Number
ADA153752

Entities

People

  • A. W. Snow
  • H. Wohltjen
  • N. L. Jarvis

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Acoustic Waves
  • Delay Lines
  • Detection
  • Detectors
  • Elements
  • Films
  • Frequency
  • Frequency Shift
  • Materials
  • Measurement
  • Mechanical Properties
  • Piezoelectric Crystals
  • Radio Frequency
  • Rayleigh Waves
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Surface Waves

Readers

  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.
  • Optical Fiber Sensing and Electromagnetic Propagation.