Multilayer Capacitor Dielectrics Produced from Metallo-Organic Precursors.
Abstract
The metallo-organic decomposition (MOD) process for preparing films or powders has a number of advantages over conventional processes. The metallo-organic compounds used in the present study had oxygen as the hetero atom to bond a metal atom to an organic ligand. This report is divided into three parts. The first details studies of the kinetics of formation of BaTiO3 and PbTiO3 by the MOD process, and demonstrates that the temperatures required are more than 200 C lower than those needed if the finest available powders are used as precursors. The second part of the report describes a study of the defect structure and dielectric properties of Nd2O3 doped BaTiO3. The use of the MOD process to prepare the various compositions insured the formation of equilibrium phases. The third part of the report discusses preliminary studies of BaTiO3 film formation by the MOD process.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 29, 1985
- Accession Number
- ADA154592
Entities
People
- G. M. Vest
- R. W. Vest
Organizations
- Purdue University