In Situ Studies of Energy Deposition by Ion Beams.

Abstract

This report summarizes the results of initial surface acoustic wave studies on a variety of systems including lithium niobate (LiNbo3), quartz (Sio2), silicon on LiNbo3, silicon on Sio2 and silicon on sapphire, which have been subjected to ion implantation and to visible laser irradiation. In addition, results of ion beam mixing studies on the Aluminum-Silicon system are reported, as well as the application of nuclear resonance profiling to a study of the near surface aluminum distribution in silicon. Keywords: Ion implantation; Ion beam mixing; Rutherford backscattering; Surface acoustic waves; Ion beam damage; Laser irradiation of surface acoustic wave system; Nuclear resonance profiling. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jun 14, 1985
Accession Number
ADA156932

Entities

People

  • F. A. Otter
  • F. Namavar
  • F. P. Lipschultz
  • J. I. Budnick
  • T. W. Grudkowski

Organizations

  • University of Connecticut

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acoustic Attenuation
  • Acoustic Properties
  • Acoustic Waves
  • Charge Carriers
  • Crystal Structure
  • Elements
  • Ion Beams
  • Ion Implantation
  • Ions
  • Materials Science
  • Measurement
  • Metals
  • Nuclear Resonance
  • Scattering
  • Spectra
  • Surface Acoustic Waves
  • Waves

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Oceanography.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy