Cryogenic Sample Stage for the CAMECA IMS-3f Ion Microscope.

Abstract

A liquid nitrogen cooled sample stage for use with the CAMECA-IMS-3F ion microscope has been designed, built and incorporated into the existing laboratory instrumentaton for SIMS analysis of samples at cryogenic temperatures. This is particularly useful for the ion microscopic analysis of frozen hydrated samples (biologicals), and the study of sputter and ion yields of materials in a water matrix. The application to semiconductor analysis is being explored. Keywords: Secondary Ion Mass Spectrometry (SIMS); Ion microscopy; Cryogenic; Laboratory technique; Instrumentation; Frozen hydrated samples.

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Document Details

Document Type
Technical Report
Publication Date
Jul 17, 1985
Accession Number
ADA158071

Entities

People

  • G. H. Morrison
  • M. T. Bernius
  • Sutapa Chandra

Organizations

  • Cornell University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors
  • Weapons Technologies

DTIC Thesaurus Topics

  • Chemistry
  • Civil Engineering
  • Engineering
  • Instrumentation
  • Mass Spectrometry
  • Materials
  • Microscopes
  • Military Research
  • New York
  • Nitrogen
  • Semiconductors
  • Spectrometers
  • Spectrometry
  • Stainless Steel
  • Technical Information Centers
  • United States
  • United States Government

Readers

  • Analytical Chemistry
  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics