Laser Produced X-Ray for High Resolution Lithography.

Abstract

During the past year the research effort was concentrated on the rapidly pulsed laser-plasma x-ray source. The effort was divided into three areas: developing the source and system, studying improved diagnostic, and making accurate x-ray measurements over a parameter matrix.

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Document Details

Document Type
Technical Report
Publication Date
Apr 17, 1985
Accession Number
ADA158734

Entities

People

  • H. M. Epstein

Organizations

  • Battelle Memorial Institute

Tags

Communities of Interest

  • Air Platforms
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force
  • Detectors
  • Electrons
  • Energy Bands
  • High Resolution
  • Laser Pulses
  • Lasers
  • Light (Electromagnetic Radiation)
  • Measurement
  • Nanosecond Time
  • Pulsed Lasers
  • Radiation
  • Repetition Rate
  • Spectra
  • Spectroscopy
  • X Ray Lithography
  • X Rays

Fields of Study

  • Physics

Readers

  • Computational Modeling and Simulation
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy