Studies of Dissolution Phenomena in Microlithography.
Abstract
Laser interferometry is useful for measuring the dissolution rate of thin polymer films. During the dissolution process, polymer in the glassy state is transported into a dilute solution. In some cases, a transition layer can be measured using laser interferometry. This layer is seen as a difference in reflected light intensity between the bare substrate and the maximum during dissolution. When PMMA dissolves in methyl ethyl ketone, the layer is not detectable below a polymer M subscript n of about 30,000. The layer becomes more pronounced as molecular weight of polymer increases.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 05, 1985
- Accession Number
- ADA159482
Entities
People
- Francisco J. Medellı́n-Rodrı́guez
- J. A. Jubinsky
- K. U. Pohl
- P. D. Krasicky
- R. J. Groele
Organizations
- Cornell University School of Chemical and Biomolecular Engineering