Evaluation of Ion Microscopic Spatial Resolution and Image Quality.

Abstract

This study of factors that influence image quality in the ion microscope will motivate modification of the existing configuration in order to improve the lateral resolution and the absolute sensitivity. The micro-test patterns provide an absolute scale of image evaluation and thus are used to characterize the imaging capabilities of the SIMS analyzer. The efforts anticipate the decreasing dimensions of the next generation of submicron structures. Additional keywords: spectroscopy; analytical chemistry. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Sep 16, 1985
Accession Number
ADA160155

Entities

People

  • G. H. Morrison
  • M. T. Bernius
  • Y. C. Ling

Organizations

  • Cornell University

Tags

DTIC Thesaurus Topics

  • Analytical Chemistry
  • Analyzers
  • Chemistry
  • Demographic Cohorts
  • Electron Beam Lithography
  • Identification
  • Image Processing
  • Mass Spectrometry
  • Microscopes
  • New York
  • Pattern Recognition
  • Recognition
  • Security
  • Sensitivity
  • Spectrometry
  • Spectroscopy
  • Universities

Readers

  • Image Processing and Computer Vision.
  • Plasma Physics.
  • Semiconductor Device Technology