Spectroscopic Diagnostics to Support Advanced Microelectronic Fabrication Techniques.

Abstract

This is the first annual report on a program to develop laser spectroscopic diagnostics for detection of gas phase species important in fabrication processes for advanced semiconductor materials. It has two objectives, to obtain quantitative spectroscopic data for these molecules, and to apply diagnostics to model fabrication systems. This report summarizes progress in the areas of investigation identified in the first year: chlorine atom detection using an infrared tunable diode laser, which will also be used to instrument a plasma etching reactor, and infrared and laser induced fluorescence spectroscopic studies of SiF2, CF2, and SiH2. Keywords include: Diagnostic Instrumentation, Electronic Materials, Infrared Absorption, Lasers, Laser-Induced Fluorescence, Microelectronic Fabrication, Semiconductor Processing, and Spectroscopy.

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Document Details

Document Type
Technical Report
Publication Date
Apr 30, 1985
Accession Number
ADA160192

Entities

People

  • A. C. Stanton
  • J. C. Wormhoudt

Organizations

  • Aerodyne Research

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Absorption Spectra
  • Chemical Vapor Deposition
  • Chemistry
  • Detection
  • Electronics Laboratories
  • Fabrication
  • Field Effect Transistors
  • Laser Diodes
  • Laser Induced Fluorescence
  • Laser Spectroscopy
  • Lasers
  • Materials
  • Measurement
  • Semiconductor Devices
  • Semiconductors
  • Spectra
  • Spectroscopy

Fields of Study

  • Physics

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Integrated Circuit Design and Technology.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Microelectronics