Molecular Beam Epitaxial (MBE) Growth of Gallium Arsenide and Gallium Aluminum Arsenide.
Abstract
The construction and operation of a molecular beam epitaxial (MBE) system for promoting the epitaxial growth of gallium arsenide (GaAs) and gallium aluminum arsenide (FaAlAs) materials is described. These materials are studied in support of development of GaAs-based microwave and millimeter-wave devices as well as fast integrated digital circuits.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 30, 1985
- Accession Number
- ADA161147
Entities
People
- Helmut Kanter
Organizations
- The Aerospace Corporation