MASTIF (MIT Analysis and Simulation Tools for IC Fabrication) - A Workstation Approach to Fabrication Process Design,

Abstract

The design of a fabrication process increasingly necessitates the availability and use of a variety of tools, including process and device simulation, analysis, and synthesis aids. The MASTIF workstation (MIT Analysis and Simulation Tools for IC Fabrication) is a menu and window oriented program written in C and Fortran which provides a methodology and uniform software structure for the connection of process and device design tools. MASTIF currently includes a facility for incremental development and version management of a process description, management mechanisms for definition of physical cross sections deriving from the overall process description, and an interactive graphics interface and data interchange for process and device simulators (SUPREM-III and MINIMOS). With MASTIF, the user can effectively develop and evaluate a fabrication process via a single integrated workstation. Keywords: Computer aided design. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1985
Accession Number
ADA162752

Entities

People

  • Dimitri A Antoniadis
  • Duane S. Boning

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Computer Science
  • Computer-Aided Design
  • Computers
  • Electrical Engineering
  • Engineering
  • Engineers
  • Fabrication
  • Graphics
  • Interactive Graphics
  • Language
  • Materials
  • Semiconductor Devices
  • Semiconductor Manufacturing
  • Semiconductors
  • Simulations
  • Simulators
  • Two Dimensional

Fields of Study

  • Engineering

Readers

  • Database Systems and Applications
  • Integrated Circuit Design and Technology.