MASTIF (MIT Analysis and Simulation Tools for IC Fabrication) - A Workstation Approach to Fabrication Process Design,
Abstract
The design of a fabrication process increasingly necessitates the availability and use of a variety of tools, including process and device simulation, analysis, and synthesis aids. The MASTIF workstation (MIT Analysis and Simulation Tools for IC Fabrication) is a menu and window oriented program written in C and Fortran which provides a methodology and uniform software structure for the connection of process and device design tools. MASTIF currently includes a facility for incremental development and version management of a process description, management mechanisms for definition of physical cross sections deriving from the overall process description, and an interactive graphics interface and data interchange for process and device simulators (SUPREM-III and MINIMOS). With MASTIF, the user can effectively develop and evaluate a fabrication process via a single integrated workstation. Keywords: Computer aided design. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1985
- Accession Number
- ADA162752
Entities
People
- Dimitri A Antoniadis
- Duane S. Boning
Organizations
- Massachusetts Institute of Technology