Introduction to Free Atoms and Particles.
Abstract
An introduction to materials, uses, and methods of free atoms and particles is presented. High temperature evaporation methods such as resistive heating, electron beam, lasers, sputtering and magnetron sputtering, and induction heating are discussed. Chemical reactivity patterns of free atoms and particles are outlined. Much data on melting point, boiling point, evaporation temperatures, vapor composition, and films and their uses are given. Keywords: Free atoms; Free particles; Reactive; Molecular fragments; Coordinative unsaturation; Evaporation; Refractory; Vapor composition; Uses; Polymerization; Films.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1986
- Accession Number
- ADA163586
Entities
People
- Kenneth J. Klabunde
Organizations
- Kansas State University