Electron Microscopy Observation of Electrotransport.

Abstract

An investigation of electromigration has resulted in the development of apparatus and test vehicles for use in conducting research in situ both in the scanning and transmission electron microscope (SEM and TEM) respectively. The unique design of test vehicles and modification of equipment allows for the experimental use of a prototype Joule-Thompson microminiature refrigerator. The refrigerator inside the SEM allows for the direct observation of electromigration experiments while controlling the temperature of the test vehicle. Research was performed in a temperature range lower than any previous effort (93K to 373K). Results agree with published literature. The patent-pending design and fabrication of the TEM specimen probe and its associated test vehicles provides the means for conducting in situ research into the crystalline structures and crystallographic changes associated with electromigration. The design provides the previously unattainable ability to monitor structure changes during the electromigration process in a non-contaminating environment which exists in the TEM. Results agree with published literature. (Thesis).

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1985
Accession Number
ADA164107

Entities

People

  • James V. Maskowitz
  • William E. Rhoden

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Crystal Lattices
  • Crystal Structure
  • Crystals
  • Electrical Engineering
  • Electron Microscopes
  • Electron Microscopy
  • Engineering
  • Fabrication
  • Films
  • Heat Energy
  • Instructors
  • Integrated Circuits
  • Measurement
  • Microscopes
  • Microscopy
  • Temperature Gradients

Fields of Study

  • Engineering

Readers

  • Aerospace Test and Evaluation
  • Electrical Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics