Solid-Phase Equilibria in the Au-As, Au-Ga-Sb, Au-In-As, and Au-In-Sb Ternaries.

Abstract

The Au-Ga-As, Au-Ga-Sb, Au-In-As, and Au-In-Sb ternaries were surveyed using X-ray powder diffraction to determine which metallic phases exist at equilibrium with the III-V compound semiconductors. In closed, small-volume systems (i.e., formation of gas-phase products was prevented), Au does not react with GaAs but does react with the other III-V's investigated to produce Au-Group III intermetallic compounds and another solid phase containing the group V element. However, each semiconductor formed pseudobinary systems with at least two different intermetallic compounds. The bulk phase diagrams determined in this study provide frameworks within which much of the experimental data in the literature concerning the products of reactions at Au/III-V interfaces can be understood.

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Document Details

Document Type
Technical Report
Publication Date
Feb 28, 1986
Accession Number
ADA165469

Entities

People

  • C. T. Tsai
  • R. Stanley Williams

Organizations

  • University of California, Los Angeles

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Reactions
  • Chemistry
  • Compound Semiconductors
  • Crystal Structure
  • Diagrams
  • Diffraction
  • Films
  • Intermetallic Compounds
  • Military Research
  • Phase Diagrams
  • Security
  • Semiconductors
  • Solid Phases
  • Solid Solutions
  • Solid State Electronics
  • Transition Temperature
  • United States

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Organic Chemistry

Technology Areas

  • Microelectronics