Instrumentation for Surface Studies for Novel Electronics Processing.

Abstract

The instrumentation purchased on this contract is to be used in the study of solid-surface phenomena and the relation of these phenomena to developing new processing or fabrication techniques for miro-electronics. Development of new processing techniques including laser direct writing, photon-assisted dry processing, the formation of metal silicides, and ion etching are currently major research efforts in the Columbia Microelectronics Sciences Laboratories. The work is supported by research contracts with AFOSR, DARPA, JSEP, and Rome Air Development Center. Author

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1985
Accession Number
ADA166093

Entities

People

  • Richard M. Osgood

Organizations

  • Columbia University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemistry
  • Contracts
  • Electron Energy
  • Electronics
  • Electrons
  • Gallium Arsenides
  • Instrumentation
  • Mass Spectra
  • Mass Spectrometers
  • Mass Spectrometry
  • Mass Spectroscopy
  • Microelectronics
  • Processing Equipment
  • Spectra
  • Spectrometers
  • Spectrometry
  • Spectroscopy

Readers

  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene