Computer-Aided Fabrication System Implementation.

Abstract

This report covers the period from October 1, 1985 through March 31, 1986. The research discussed here is described in more detail in several published and unpublished reports cited below. During this period, the installation of the central computing machine for the MIT CAF work, known as CAF and all the necessary software was substantially completed. The machine is a VAX 11/785. It has a large cadre of users. A rudimentary CAF system, known as CAFE (Computer-Aided Fabrication Environment), has been implemented. So far this system provides an electronic personal notebook, machine instructions, and equipment status reports. Four fabrication facilities are being served, at least in part. Even though crude, CAFE has been in constant use. The requirements of a scheduling program are being studied. One surprising result so far is the importance of setup operations in scheduling some equipment. Two new process-simulation modules have been developed. One is for a focused ion beam operation used for implanting, and the other is for nonuniform oxidation. Improved models were inserted into the simulators SUPREM and MINIMOS. Keywords: Computer aided manufacturing; Industrial production; and Computer aided design.

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Document Details

Document Type
Technical Report
Publication Date
Mar 31, 1986
Accession Number
ADA166787

Entities

People

  • Dimitri A Antoniadis
  • Donald E. Troxel
  • Paul Penfield Jr.
  • Stanley B. Gershwin

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Algorithms
  • Ceramic Materials
  • Circuits
  • Engineering
  • Fabrication
  • Flow
  • Fluid Flow
  • Integrated Circuits
  • Materials
  • Measurement
  • Scheduling (Production)
  • Semiconductor Devices
  • Semiconductor Manufacturing
  • Semiconductors
  • Simulations
  • Simulators
  • Students

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Industrial Economics
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics