Photodesorption Cleaning of Silicon with Vacuum Ultraviolet Irradiation

Abstract

An investigation into the use of vacuum-ultraviolet irradiation for photodesorption cleaning of the surface of silicon contaminated by carbonyl and hydrocarbon adsorbates has been made. Keywords include: Vacuum-ultraviolet irradiation, Carbonyl adsorbates, Hydrocarbon adsorbates, Auger spectrometer, Argon lamp, Xenon lamp, and Aliphatic hydrocarbons.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Apr 04, 1986
Accession Number
ADA167420

Entities

People

  • A. R. Calloway
  • P. A. Bertrand

Organizations

  • The Aerospace Corporation

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Aliphatic Hydrocarbons
  • Chemical Vapor Deposition
  • Contracts
  • Electrons
  • Emission Spectra
  • Environmental Pollutants
  • Hydrocarbons
  • Lamps
  • Mass Spectrometers
  • Materials
  • Security
  • Semiconductor Devices
  • Semiconductors
  • Spectra
  • X Rays
  • Xenon Lamps

Readers

  • Nuclear and Radiation Engineering.
  • Petroleum Engineering
  • Thin Film Deposition Science.