Ion Acoustic Microscopy
Abstract
This report details the modifications to an existing ion implanter which were made in order to use it for ion acoustic microscopy. Results are described of tests of the technique on samples of cubic zirconia implanted with nitrogen ions. The utility of the technique for monitoring the progress of implantation in metals and ceramics is discussed. Keywords: Ion acoustic microscopy; photoacoustic microscopy; Thermal wave imaging; Zirconia; Ion Implantation.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1985
- Accession Number
- ADA169492
Entities
People
- Douglas N. Rose
- Keith O. Legg
Organizations
- Georgia Tech Research Corporation