Multilayer Capacitor Dielectrics Produced from Metallo-Organic Precursors.
Abstract
The metallo-organic decomposition (MOD) process for preparing films or powders has a number of advantages over conventional processes. The metallo-organic compounds used in the present study had oxygen as the hetero atom to bond a metal atom to an organic ligand. These compounds were each dissolved in an appropriate solvent and the solutions mixed to achieve the desired stoichiometry. After adjusting the rheology, the formulation was deposited on an appropriate substrate to make a film or contained in a platinum dish to make a powder, and pyrolyzed too yield the inorganic product. Since the mixing of the starting materials is on the molecular level, the inorganic species exist as atoms or molecules in intimate contact immediately after decomposition. This leads to much more rapid formation of compounds and sintering of films, which translates to lower temperature processing of equilibrium phases and more dense films.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 30, 1985
- Accession Number
- ADA170713
Entities
People
- G. M. Vest
- R. W. Vest
Organizations
- Purdue University