Laser Produced X-Ray for High Resolution Lithography and a Photoionization Laser.
Abstract
The majority of the project was spent investigating laser produced x rays for high resolution lithography. This work involved measurements over an extensive parameter matrix. Specifically, efficiency of conversions to x rays was qualified as a function of (1) laser pulse energy, (2) laser pulse width, (3) plasma profile, (4) laser wavelength, (5) target atomic number, (6) initial focal area, and (7) focal ratio of the lens. Experimental research was performed on a photoionization x ray laser concept. Specifically, a thin polyethylene, oxidicarbonate film was vaporized. Fifteen nanoseconds into its expansion, the vapor was illuminated by a 200 psec Fe spectrum x ray pulse. Photoionization of the inner K shell of oxygen was then observed. The potential efficiency of this type of laser was found to be comparatively low.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 14, 1986
- Accession Number
- ADA170782
Entities
People
- Bernerd Campbell
- Dave Applebaum
- Harold Epstein
Organizations
- Battelle Memorial Institute