Direct Writing of Microstructures for Solid-State Electronics
Abstract
This report summarizes two years of research on new laser processing techniques on opto- and microelectronics. The main results are in 1) the demonstration of UV laser direct writing of low resitivity metal lines, and the subsequent demonstration of the usefulness of laser writing (via deposition) in the reconfiguring of an LSI circuitry; and 2) the discovery, characterization, and understanding of the techniques of light-guided etching for the fabrication of ultra-high-aspect-ratio microelectronics structures. In the case of light- guided etching, an application of the technique to optical interconnects has already been demonstrated. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 19, 1986
- Accession Number
- ADA170837
Entities
People
- Richard M. Osgood, Jr.
Organizations
- Columbia University