Switchable Zero Order Diffraction Gratings as Light Valves.

Abstract

The work on light valves has essentially stopped and all efforts have been directed to the added task on 'focused ion beam assisted deposition'. The only exception is work done to prepare a paper on 'The Investigation on Embossing of Fine Features into Solid Polymer Films' for the Society of Plastics Engineers meeting. In the area of focused ion beam assisted deposition our work has concentrated on depositing metal patterned with submicron resolution without the use of a mask or resist. This has applications to integrated circuit rewiring, repair, or prototyping and to the repair of defects in x-ray lithography masks.

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Document Details

Document Type
Technical Report
Publication Date
Mar 31, 1986
Accession Number
ADA171052

Entities

People

  • John Melngailis

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Deposition (Materials Processing)
  • Electronics
  • Engineering
  • Films
  • Gratings (Spectra)
  • Integrated Circuits
  • Ion Beams
  • Ions
  • Massachusetts
  • Materials
  • Materials Processing
  • Military Research
  • Polymeric Films
  • Program Management
  • Technical Information Centers
  • Vapor Pressure
  • X Ray Lithography

Readers

  • Nanofabrication and Microfabrication.
  • Pavement Materials Engineering.
  • Thin Film Deposition Science.