Special Techniques for the Auger Analysis of Microelectronic Devices.

Abstract

Microelectronic devices are becoming more complex and device features are getting smaller as the level of integration continues to increase. Although scanning Auger microscopy has been applied extensively to the analysis of microelectronic devices with a great deal of success, the analysis of current and future devices is presenting new challenges. The major limitations are: (1) features of interest in microelectronic circuits are often comparable in size to the beam diameter of commercial Auger microprobes, and (2) the electron beam tends to drift about on the specimen surface because of mechanical instability and differential thermal expansion of the apparatus. In this technical report, we present information on two different techniques that were developed to overcome these limitations. In the specimen modulation technique, the modulating signal is applied to the electrically analyzer. This method of modulation permits the detection of only the Auger electrons that are emitted from the modulated region.

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Document Details

Document Type
Technical Report
Publication Date
Jul 31, 1986
Accession Number
ADA171631

Entities

People

  • G. W. Stupian
  • M. S. Leung

Organizations

  • The Aerospace Corporation

Tags

Communities of Interest

  • Advanced Electronics
  • Space
  • Weapons Technologies

DTIC Thesaurus Topics

  • Amplifiers
  • Artificial Intelligence
  • Auger Electrons
  • Chemical Kinetics
  • Chemistry
  • Detection
  • Detectors
  • Electron Beams
  • Electron Energy
  • Field Effect Transistors
  • Materials
  • Materials Science
  • Metal Oxide Semiconductors
  • Physics Laboratories
  • Semiconductor Devices
  • Semiconductors
  • Spectra

Readers

  • Integrated Circuit Design and Technology.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Systems Analysis and Design

Technology Areas

  • Directed Energy
  • Microelectronics