PH-Sensitive WO(3)-Based Microelectrochemical Transistors.
Abstract
Electrochemical properties of an array of closely spaced (1.2 micron) Au or Pt microelectrodes (approx. 2 micron wide x approx. 50 micron long x 0.1 micron high) coated by a 0.15 micron thick layer of polycrystalline W03 are reported. The W03 is deposited on the electrodes by rf sputtering of a W03 target. The cyclic voltammetry of these microelectrodes indicates that W03 connects individual microelectrodes, since the voltammogram of a pair of microelectrodes driven together is indistinguishable from that of an individual microelectrode. W03 becomes a good conductor upon electrochemical reduction in aqueous solutions. The change in resistance of W03 connecting two microelectrodes as a function of electrochemical potential spans four orders of magnitude.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 22, 1986
- Accession Number
- ADA172299
Entities
People
- Mark S. Wrighton
- Michael J. Natan
- Thomas E. Mallouk
Organizations
- Massachusetts Institute of Technology