High and Low Energy Particle Beams Interactions with Solids.
Abstract
The major goal of this research has been to establish a center for the preparation and surface characterization of advanced materials related to the construction of high speed electronic devices. The focal point of the experimental side of our center has been a molecular beam epitaxial (MBE) growth facility directly attached to a sophisticated surface analysis system. The growth facility has been initially set up to study the chemical aspects of interface formation during the fabrication of multilayer systems. The analysis chamber incorporates a number of novel approaches to characterizing the chemistry of these interfaces with unprecedented detail. These include LEED, XPS, angle resolved SIMS and Helium atom diffraction. On the theoretical side, our goal has been to establish extensive computational hardware and software for the modeling of the interaction of energetic particles with solids. This project has involved the development of interaction potentials which accurately predict forces between atoms in materials with directional bonding such as Gallium Arsenide and Silicon.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1986
- Accession Number
- ADA172422
Entities
People
- Nicholas Winograd
Organizations
- Pennsylvania State University