Instrumentation for Research on Ultra-Small GaAs Devices.

Abstract

This grant, under the DoD University Research Instrumentation Program funded the purchase of processing equipment for GaAs structures and devices this processing facility is now completed and in operation.

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Document Details

Document Type
Technical Report
Publication Date
Aug 29, 1986
Accession Number
ADA173246

Entities

People

  • James S. Harris

Organizations

  • Stanford University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Contracts
  • Dielectrics
  • Electronics
  • Electronics Laboratories
  • Evaporation
  • Evaporators
  • Instrumentation
  • Modules (Electronics)
  • Monitors
  • Photolithography
  • Processing Equipment
  • Research Facilities
  • Semiconductors
  • Stations
  • Thickness
  • Work Stations

Readers

  • Optical Physics and Photonics.
  • Research Science/Academic Research