Final Report for ONR Contract N00014-83-K-0612.
Abstract
Synthesis and Characterization of Thermodynamically Stable Metal Contacts for III-V Compound Semiconductors are discussed. The goals of this program were: 1) the study of the bulk thermodynamics of metal/compound seimconductor systems, 2) the identification of materials that were chemically stable when in contact with the compound semiconductors, 3) growing thin films of these metals on semiconductor substrates, and 4) the characterization of the resulting thermodynamically stabilized systems to see if interfacial chemical reactions could be controlled and if they might be of use in contacting technology.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1986
- Accession Number
- ADA173789
Entities
People
- R. Stanley Williams
Organizations
- University of California, Los Angeles