Chemical Reactions at the Au/InP Interface.
Abstract
Chemical reactions at the Au/InP interface were investigated in the temperature range 25 510C by x-ray diffractometry, scanning electron microscopy and energy dispersive X-ray analysis. The samples were prepared by depositing gold films onto clean InP(100) single-crystal substrates under .000000001 torr vaccum. Spots appeared in SEM micrographs of the deposited film of a sample annealed at room temperature for 35 days, indicating that a solid state reaction had occurred. After the sample was heated to 330C under flowing N2 gas, dendritic islands were observed in the film. A 365C anneal turned the color of the Au film from yellow to pink, and Au, dendritic islands and Au2P3 were identified by X-ray diffractometry. In reacting with the InP substrate, dendritic islands produced silver-colored gamma and more Au2P3 at 450C. With respect to InP, gamma was relatively stable, and further reactions were minimal even when the sample was annealed at 510C for 40 min under atmospheric-pressure N2. The ternary phase diagram for the bulk Au-In-P system provides the basis for understanding the sequence of the above results and much of the information in the literature about Au/InP interfacial reactions.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 15, 1986
- Accession Number
- ADA174094
Entities
People
- C. T. Tsai
- R. Stanley Williams
Organizations
- University of California, Los Angeles