DoD-University Resesarch Instrumentation Program.
Abstract
The capability of this facility was rather limited in terms of line resolution, contact uniformity, fabrication yield, and versatility. Although much encouraging results have been demonstrated with the preliminary devices, the lack of an ion-milling machine has kept on-going research projects from achieving much more results expeditiously. Similarly, the lack of the Ion Milling Machine has kept the group from fabricating micron-width grooves, slots, gratings, ridge waveguide, etc., on LiNbO3 and GaAs substrates for robust coupling between the optical fibers and the devices being explored, and thus realization of integrated optic device modules. An Ion-Milling Machine has been purchased. A special laboratory compartment together with necessary electrical and wet-lab utilities were constructed for installation of the complete ion milling machine facility. The facility will be in full operation in the near future.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 29, 1986
- Accession Number
- ADA174915
Entities
People
- Chen S. Tsai
Organizations
- University of California, Irvine