Multipoint Auger Depth Profiling System.
Abstract
A computer-based control system for the scanning Auger microprobe (SAM) is described that greatly enhances laboratory capabilities to characterize microelectronic devices. Programs under way are designed to improve the reliability of gallium arsenide field effect transistors through a study of degradation resulting from diffusion of contact metallization. These studies depend on determining elemental compositions as a function of depth (depth profiling) in various regions of devices after the devices are subjected to electrical and thermal stress. The SAM data handling system cannot process data originating at more than one point. This constraint severly limits the depth profiling capability of the SAM as applied to microelectronic devices. Laboratory personnel have developed a computerized control system to depth profile a specimen at a number of different points simultaneously. This capability will provide information on the distribution of chemical elements in three dimensions needed to study device degradation. Data illustrating the capability of the computerized profiling system are presented.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 15, 1986
- Accession Number
- ADA175534
Entities
People
- Gary W. Stupian
- Martin S. Leung
Organizations
- The Aerospace Corporation