Surface Research with High Resolution Electron Microscopy.

Abstract

A special surface research electron microscope has been ordered, to be based on the HB501 scanning transmission electron microscope with modifications to allow an increased range of applications to the study of surfaces by high resolution imaging, microdiffraction and microanalysis and also the use of surface research techniques such as Auger analysis and imaging. Keywords: Electron microscopy; Ultra high vacuum; Surface structure; Surface analysis.

Document Details

Document Type
Technical Report
Publication Date
Oct 28, 1986
Accession Number
ADA175769

Entities

People

  • John M. Cowley

Organizations

  • Arizona State University

Tags

DTIC Thesaurus Topics

  • Electron Microscopes
  • Electron Microscopy
  • Electrons
  • High Resolution
  • High Vacuum
  • Microanalysis
  • Microscopes
  • Microscopy
  • Scanning
  • Surface Analysis
  • Surfaces
  • Vacuum

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene