Graduate Fellowships in Modern Optics.
Abstract
The effects of Ion Assisted Deposition (IAD) of thin film coatings is reported. Increased durability and abrasion resistance were obtained for films deposited at room temperature when IAD was employed, and the adhesion of films deposited onto plastic substrates was greatly improved by IAD. In addition, it was found that IAD results in a decreased absorption of moisture by thin films without otherwise affecting their optical properties. Also reported are results for the fabrication of gratings used to couple optical energy into various waveguide materials. Grating couplers, which can withstand higher powers than prism couplers, are also less expensive to produce and can have fairly high coupling efficiencies. The milling of photo-resist gratings into a glass substrate with Freon 116 yielded impressive results: gratings of periods 0.7 micrometer and depths of 0.8 micrometer were obtained. Keywords: Ion assisted deposition; Surface parametric mixing; Surface enhanced Raman scattering; Thin films; Coherent anti-Stokes Raman scattering; Grating couplers; Moisture desorption in thin films; Ion bombardment; Guided wave gratings.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1986
- Accession Number
- ADA176429
Entities
People
- Charles M. Kennemore
- H. A. Macleod
- Jack D. Gaskill
- Robert S. Moshrefzadeh
- Ursula J. Gibson
Organizations
- University of Arizona