Laser Evaporation Studies.
Abstract
The used of a pulsed laser to evaporate dielectric materials for optical thin film deposition was investigated. The electrical properties of the laser induced plasma in the evaporant plume were studies. High flux (20A/sq cm) of high velocity (1 to 10 million) cm/s) ionic species were observed in the TEA-CO2 laser evaporation of many refractory oxide, chalcogenides and fluorides. Thin films of ZrO2 were deposited out of a plasma described above. These films were dense, oriented polycrystalline and had bulk refractive index values (2,15), low absorption (K about 0.001) and low particulate density for a range of laser fluence values. In the next and final phase of this project, thin film studies will be extended to a wider array of materials, with emphasis on obtaining high quality films with low particulate densities. Keywords: Zirconium dioxide; Carbon dioxide lasers; Tea lasers.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1986
- Accession Number
- ADA176826
Entities
People
- H. Sankur