Investigations into the Origins of the Physical Structure of Thin Films.
Abstract
Thin film morphology often plays a critical role in the large variation in film properties with varying film preparation conditions. The research being carried out under this grant has been directed toward establishing a quantitative link between preparation property relations. A central part of this work has been to develop a fractal model of the general cauliflower like morphology that pervades films prepared under low adatom mobility conditions. The general approach has been to attack this problem from a number of different angles. Keywords: Thin films; Sputtering; Ion assisted deposition; Morphology, Random aggregation; Fractals; Morphology evolution.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 16, 1986
- Accession Number
- ADA176943
Entities
People
- Russell Messier
Organizations
- Pennsylvania State University