Template-Set Approach to VLSI Pattern Inspection,

Abstract

A new approach is described for the automatic detection of defects in VLSI circuit patterns such as photomasks and wafers. It is based on morphological feature extraction using templates that represent a set of local pixel configuration within a specified window. These templates are stored in content-addressable memories (CAMs) to facilitate parallel comparisons of window-pattern scanning over a tested image. Maskable CAMS reduce the size of a template set substantially. Two error-detection algorithms are implemented to detect both random defects and dimensional errors. (Author)

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1984
Accession Number
ADA176966

Entities

People

  • James T. Walker
  • Soo-lk Chae

Organizations

  • Stanford University

Tags

DTIC Thesaurus Topics

  • Algorithms
  • Automatic
  • Content Addressable Memory
  • Detection
  • Extraction
  • Feature Extraction
  • Inspection
  • Scanning
  • Template Patterns

Readers

  • Computer Vision.
  • Integrated Circuit Design and Technology.

Technology Areas

  • AI & ML