Design and Fabrication of Submicron Magnetic Bubble Device Technology.
Abstract
Work was carried out on high density (16 to 64 Mbit/sq cm) magnetic bubble device technology. Highlights of the research include the successful fabrication of silicon MOSFETS on bubble garnet substrates and the development of ion implanted bubble devices utilizing 0.5 micrometers bubbles in garnets with isotropic magnetostriction. In addition, studies of the effects of ion implantation on garnet lead to improved fabrication techniques for the 0.5 micrometers devices. Chips utilizing 1 micrometer bubbles were demonstrated to have about 9% bias field margins at 50 Oe drive, and a numerical model was developed to model current accessed ion implanted devices. Keywords: Bubble Memory; Ion Implantation; Garnet; Silicon on Insulator; Silicon on Garnet.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 31, 1986
- Accession Number
- ADA177070
Entities
People
- C. L. Bauer
- D. W. Greve
- M. Alex
- M. H. Kryder
- R. O. Campbell
Organizations
- Carnegie Mellon University