Reproducibility of Electromigration Measurements
Abstract
The reproducibility of median time to failure (t sub 50) measurements was determined in an interlaboratory experiment in which 11 laboratories took part with a reference laboratory. Each laboratory used a method of its choosing to test equivalent samples under the same conditions of current density and oven temperature. The between laboratory reproducibility of t sub 50 measurements normalized to one metallization temperature was dependent on current-density stress: at 1.0 MA/sq cm it was within 15%, while at 2.5 MA/sq cm it was generally within 50%. The primary source for variability is in estimating the temperature rise of the test metallization due to joule heating. Recommendations are given for the design and test of electromigration test structures to improve the reproducibility of t sub 50 measurements.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1987
- Accession Number
- ADA177369
Entities
People
- Harry A. Schafft
- John D. Shott
- John Mandel
- Tammy C. Staton
Organizations
- Stanford University