Characterization of Material Device Structures.
Abstract
Impurities and defects in semiconducting and semi-insulating GaAs and other III-V compounds have been investigated by electrical, optical, and mass spectroscopic techniques. Modulation-doped field-effect transistors have been fabricated and tested. A CAE/CAD environment has been implemented for the design, development, and evaluation of electronic circuitry. Keywords include: GaAs, Antisite, AlGaAs, InGaAs, Modulation-doped, III-V Compounds, Semi-insulating, Ion Implantation, Native Defects, Hall Effect, and Quantum Well.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 11, 1987
- Accession Number
- ADA178262
Entities
People
- D. C. Look
- Dennis C. Walters
- George E. Norris
- Phil W. Yu
- William M. Theis
Organizations
- Wright State University