Solid-State Threshold Accelerometer Chip.
Abstract
Micromechanical cantilever beam structures having a maximum length of 0.16 in. were designed, fabricated, and tested in six configurations for use as threshold acceleration sensors for projectile fuzes. Their small size and ability to be produced using monolithic fabrication techniques commonly used to make integrated circuits provides the possibility of incorporating multiswitch arrays into a single die surface area one hundredth of a square inch. Design, fabrication, and test details are provided for two triple-beam arrays of cantilever structures made from 3-micrometer-thick silicon dioxide. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 28, 1987
- Accession Number
- ADA180112
Entities
People
- Al Meyer
- Lou Faraco
Organizations
- Motorola Mobility