Intense XUV (Extreme Ultraviolet) Radiation Sources.
Abstract
In the research, characterizations were performed of the Extreme Ultraviolet outpit of our laser produced plasma system in the 30-1200 A region and have used the system for preliminary studies in high resolution spectroscopy in the grazing incidence region and in soft x ray microlithography. Contents: Laser Produced Plasma Light Sources; XUV and soft x ray Radiation from Laser Produced Plasmas as Laboratory Spectroscopic Sources Laser Produced Plasma Light Sources for High Resolution XUV and VUV Spectroscopy; Soft x ray Lithography using Radiation From Laser Produced Plasmas; Laser Produced Plasma Light Sources for High Resolution XUV and VUV Spectroscopy; High Resolution Spectra of Laser Plasma Light Sources in the Grazing Incidence Region; and Photometric Investigation of a Laser Produced Plasma VUV Light Source.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 31, 1985
- Accession Number
- ADA180218
Entities
People
- M. L. Ginter
Organizations
- University of Maryland