Intense XUV (Extreme Ultraviolet) Radiation Sources.

Abstract

In the research, characterizations were performed of the Extreme Ultraviolet outpit of our laser produced plasma system in the 30-1200 A region and have used the system for preliminary studies in high resolution spectroscopy in the grazing incidence region and in soft x ray microlithography. Contents: Laser Produced Plasma Light Sources; XUV and soft x ray Radiation from Laser Produced Plasmas as Laboratory Spectroscopic Sources Laser Produced Plasma Light Sources for High Resolution XUV and VUV Spectroscopy; Soft x ray Lithography using Radiation From Laser Produced Plasmas; Laser Produced Plasma Light Sources for High Resolution XUV and VUV Spectroscopy; High Resolution Spectra of Laser Plasma Light Sources in the Grazing Incidence Region; and Photometric Investigation of a Laser Produced Plasma VUV Light Source.

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Document Details

Document Type
Technical Report
Publication Date
Jul 31, 1985
Accession Number
ADA180218

Entities

People

  • M. L. Ginter

Organizations

  • University of Maryland

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Air Force
  • Detectors
  • Diffraction
  • High Resolution
  • Ionization
  • Laser Beams
  • Laser Pulses
  • Lasers
  • Light (Electromagnetic Radiation)
  • Light Sources
  • Line Spectra
  • Measurement
  • Optics
  • Repetition Rate
  • Spectra
  • Spectroscopy
  • X Ray Lithography

Fields of Study

  • Physics

Readers

  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy