The Use of Ion Implantation for Materials Processing.

Abstract

An interdisciplinary program on the use of ion implantation for materials processing is being conducted at NRL. This report describes the important factors in ion implantation science and technology and reports progress in the use of ion implantation to modify friction, wear, fatigue, corrosion, optical and magnetic properties of materials. Keywords: Auger electron spectroscopy; Corrosion; Ion beam; Deposition; Rutherford backscattering.

Document Details

Document Type
Technical Report
Publication Date
Dec 31, 1986
Accession Number
ADA180444

Entities

People

  • F. A. Smidt

Organizations

  • United States Naval Research Laboratory

Tags

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Corrosion
  • Electron Spectroscopy
  • Electrons
  • Implantation
  • Ion Beams
  • Ion Implantation
  • Ions
  • Magnetic Properties
  • Materials
  • Materials Processing
  • Spectroscopy

Readers

  • Technical Research and Report Writing.
  • Thin Film Deposition Science.
  • Tribology (the study of the boundary interaction between sliding surfaces, lubrication, wear and friction).

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene