Theoretical Investigation of Homogeneous and Heterogeneous Reactions in the Chemical Vapor Deposition of Silicon from Silane.

Abstract

This report summarizes the computer equipment purchased on grant AFOSR-85-0115. The Scientific programs being supported by this equipment are described and finally a listing of all papers published since the acquisition of the computer is given. Keywords: Computers; Theoretical chemistry; Silicon.

Document Details

Document Type
Technical Report
Publication Date
Jan 15, 1987
Accession Number
ADA180995

Entities

People

  • Donald L. Thompson

Organizations

  • Oklahoma State University–Stillwater

Tags

DTIC Thesaurus Topics

  • Acquisition
  • Chemical Vapor Deposition
  • Chemistry
  • Computational Chemistry
  • Computers
  • Engineering
  • Materials Engineering
  • Materials Science
  • Physics
  • Vapor Deposition

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Surface Engineering/Surface Coating Technology.
  • Theoretical Analysis.