Crystal Growth and Mechanical Properties of Semiconductor Alloys.
Abstract
The mechanical properties of semiconductor materials are related to changes in electronic and optical properties that may occur during the processing of materials into wafers and wafers into devices. Recent theoretical models related hardness in ternary semiconductor alloys to fundamental atomic properties, but few data are available. The report details the progress made in exploring methods for mechanical property studies of these alloys. Three approaches were used: hardness measurements in thick films (10-100 micrometer) using conventional microhardness, techniques; hardness measurements in thin films (less than 1 micrometer) using a nanoindenter; and the growth of bulk samples for use in conventional mechanical tests.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 21, 1987
- Accession Number
- ADA181197
Entities
People
- D. A. Stevenson
Organizations
- Stanford University