Thin-Film Optoelectronic Circuits Research Program.
Abstract
The program objective has been to identify and investigate IC-compatible fabrication processes for thin-film optoelectronic circuits on GaAs. Single-mode channel waveguides of SiO2-ZnO-SiO2, SiO2-Al2O3-TaO2-SiO have been deposited on GaAs by ion-beam sputtering. Straight guides, curves, tapers, Y-branches, crossovers, and directional couplers have all been demonstrated. Novel concepts have been developed for integrated GaAs Schottky photodiodes and self-aligning fiber-to-waveguide couplers. An IC-compatible baseline fabrication process has been established and a photomask set has been completed for an optoelectronic circuit demonstration, including Mach-Zehnder interferometric modulators, delta-beta electro-optic switches, and integrated GaAs photodetectors. Keywords include: Integrated Optics, Gallium Arsenide (GaAs), Zinc Oxide (ZnO), Electro-Optic Devices, and Thin-Film Waveguides.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1987
- Accession Number
- ADA181445
Entities
People
- Steven M. Arnold
Organizations
- Honeywell International, Inc.