Template-Set Approach to VLSI (Very Large Scale Integrated) Pattern Inspection,

Abstract

A new approach is described for the automatic detection of defects in VLSI circuit patterns such as photomasks and wafers. It is based on morphological feature extraction using templates that represent a set of local pixel configurations within a specified window. These templates are stored in content-addressable memories (CAMs) to facilitate parallel comparisons of window-pattern scanning over a tested image. Maskable CAMs reduce the size of a template set substantially. Two error-detection algorithms are implemented to detect both random defects and dimensional errors.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1984
Accession Number
ADA182357

Entities

People

  • Chong-cheng Fu
  • David H. Dameron
  • James D. Meindl
  • James T. Walker
  • Soo-ik Chae

Organizations

  • Stanford University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Algorithms
  • Circuits
  • Color Displays
  • Computer-Aided Design
  • Computers
  • Content Addressable Memory
  • Defect Detection
  • Detection
  • Inspection
  • Integrated Systems
  • Molecular Dynamics
  • Roughness
  • Shift Registers
  • Template Patterns
  • Two Dimensional
  • Video Signals

Readers

  • Computer Vision.
  • Integrated Circuit Design and Technology.

Technology Areas

  • AI & ML